{"product_id":"9780128177877","title":"Handbook of Silicon Based MEMS Materials and Technologies","description":"A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. \u003cp\u003e\u003cb\u003eKey topics covered include:\u003c\/b\u003e\u003c\/p\u003e \u003cul\u003e  \u003cli\u003eSilicon as MEMS material\u003c\/li\u003e \u003cli\u003eMaterial properties and measurement techniques\u003c\/li\u003e \u003cli\u003eAnalytical methods used in materials characterization\u003c\/li\u003e \u003cli\u003eModeling in MEMS\u003c\/li\u003e \u003cli\u003eMeasuring MEMS\u003c\/li\u003e \u003cli\u003eMicromachining technologies in MEMS\u003c\/li\u003e \u003cli\u003eEncapsulation of MEMS components\u003c\/li\u003e \u003cli\u003eEmerging process technologies, including ALD and porous silicon\u003c\/li\u003e \u003c\/ul\u003e \u003cp\u003eWritten by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R\u0026amp;D and academic communities. \u003c\/p\u003e \u003cul\u003e \u003cli\u003e\n\u003ci\u003eVeikko Lindroos\u003c\/i\u003e is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland.\u003c\/li\u003e \u003cli\u003e\n\u003ci\u003eMarkku Tilli\u003c\/i\u003e is Senior Vice President of Research at Okmetic, Vantaa, Finland.\u003c\/li\u003e \u003cli\u003e\n\u003ci\u003eAri Lehto\u003c\/i\u003e is Professor of Silicon Technology at Helsinki University of Technology, Finland.\u003c\/li\u003e \u003cli\u003e\n\u003ci\u003eTeruaki Motooka\u003c\/i\u003e is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan.\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Elsevier Science","offers":[{"title":"Default Title","offer_id":46588953362673,"sku":"9780128177877","price":290.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0674\/5433\/7265\/files\/9780128177877_p0.jpg?v=1765839358","url":"https:\/\/shop.barnesandnoble.com\/products\/9780128177877","provider":"Barnes \u0026 Noble","version":"1.0","type":"link"}